Calculated Sputtering, Reflection and Range Values
W. Eckstein · OpenGrey (Institut de l'Information Scientifique et Technique) · 2002
The Monte Carlo program TRIM.SP was applied to calculate sputtering yields, reflection coefficients and mean ranges. Tables of these values are produced in the energy range from 10 eV to 300 keV and for several angles of incidence. Li, Be, B, C, Mg, Al, Si, P, Ti, Fe, Ni, Cu, Ga, Ge, Nb, Mo, Ag, In, Cs, Sm, Ta, W, Pt, Au, Hg and U are chosen as one-component target materials, BeO, B_4C, B_2O_3, B(OH)_3, TiC, WO_3, WO_4, W_xO_y as more component targets. Some examples for layered structures are also given. #mu#, H, D, T, "3He, "4He, C, N, O, Ne, Na, Mg, Al, P, Ar, K, Kr, Xe, Hg, Bi and Rn are selected as projectiles. Selfbombardment and an incident Maxwellian distribution is regarded for some cases, too. (orig.)