3D Surface Profiling via Direct End‐to‐End Regression With a Photonic Geometric Sensor
Ziyao Zhang, Yizhi Wang, Chunhui Yao, Huiyu Huang, Rui Ma, Xin Du, Wanlu Zhang, Zhitian Shi, Minjia Chen, Ting Yan, Liang Ming, Yuxiao Ye, Richard V. Penty, Qixiang Cheng · Laser & Photonics Review · 2026
ABSTRACT Measurements of microscale surface patterns are essential for process and quality control in industries across semiconductors, micro‐machining, and biomedicine. However, the development of miniaturized and intelligent profiling systems remains a longstanding challenge, primarily due to the complexity and bulkiness of existing benchtop systems required to scan large‐area samples. A real‐time, in situ, and fast detection alternative is therefore highly desirable for predicting surface topography on the fly. In this paper, we present an ultracompact geometric profiler based on photonic integrated circuits, which directly encodes the optical reflectance of the sample and decodes it with a neural network. This scheme avoids explicit recovery of complex interferometric spectra and the associated fitting algorithms. We show that an integrated programmable circuit can generate pseudo‐random kernels to project input data into higher dimensions, enabling efficient feature extraction via a lightweight one‐dimensional convolutional neural network. Our device is capable of reliable, fast‐scanning‐rate thickness identification for both smoothly varying samples and intricate 3D printed emblem structures, paving the way for a new class of compact geometric sensors.