Analysis and Design of High Frequency Plasma Generation System Algorithm
Liang Zhu, Ning Zhang, Zhixuan Wang · 2024
Under the background of the transformation and upgrading of the manufacturing industry and the rapid rise of emerging industries, new materials and new technologies have received extensive attention. Plasma discharge technology shows great potential in many fields because of its environmental friendliness and wide application. Gas/liquid phase discharge through plasma generation system is an important technical means to generate plasma. In this paper, a high-frequency plasma generation system is analyzed and designed. Firstly, the theoretical analysis and comparison of the generation structure are carried out, and the dielectric barrier discharge (DBD) with uniform structure is used. Then, the load characteristics of the two states are modeled and analyzed. The excitation part uses the power factor correction (PFC) series buck circuit and phase shifted full bridge inverter (PSFB) as the main circuit. The input voltage range is AC 110220 V, the output voltage range is$5 \text{kV}-20 \text{kV}$, and the output frequency is$20 \text{kHz}-50 \text{kHz}$. The wide aperture regulation of voltage and frequency is realized to meet requirements for working parameters of plasma source in DBD mode.