Development of High Density 3D NAND Flash Memory Using New Scaling Technologies for AI Semiconductor
Daewoong Kang, Minkyo Suh, Gwansun Choi, Chaeyeon Jung · 2025
Scaling technology of 3D NAND flash is recently required to implement large-capacity memory and high performance due to recent demand of AI semiconductors. However, it is suffering from the critical issues such as cell current, cell to cell interference and retention characteristics. In this paper, the new methods that enable for device scaling and performance were introduced.