STUDY OF MECHANICAL PARAMETERS OF THE SENSITIVE ELEMENT OF THE RESONANT-FREQUENCY PRESSURE SENSOR
Alena Talovskaya, Denis M. Mokhovikov, Evgenii S. Barbin, Ivan V. Kulinich, Angelina Guliaeva · Izvestiya vysshikh uchebnykh zavedenii Fizika · 2024
The paper considers the sensitive element of the resonant-frequency pressure sensor, its characteristics, and comparison with other types of pressure sensors. As a result of the analysis, it was revealed that the main disadvantages of this type of devices are low values of sensitivity. To solve this problem, it is proposed to replace the monocrystalline silicon membrane by a composite membrane with a subsequent change in the geometry of resonators. To confirm the effectiveness of this method, modeling of the silicon and composite membrane is presented, showing the change in the frequency of natural oscillations and internal stresses.