Acoustic Devices
Arnaldo D’Amico, Corrado Di Natale, Enrico Verona · 2024
Electroacoustic devices can be successfully exploited to implement chemical sensors. In this context both bulk acoustic wave (BAW) and surface acoustic wave (SAW) propagation are suitable for sensor applications. The operation of acoustic-type chemical sensors is based on the changes produced by the measurand on the physical properties of suitable membranes made of chemically interactive materials (CIM). The material physical properties whose changes can be detected using acoustic probe techniques include mass density as well as both linear and non-linear elastic and viscoelastic properties. Because of the presence in the sensor of piezoelectric materials used for acoustic transduction, electric and dielectric properties of the membrane can also enter into the device response.