Microfabricated Ion Traps on Sapphire for Larger Trap Areas and Higher Qubit Count

Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States), Zachary Meinelt, USDOE Assistant Secretary for Human Resources and Administration, Matthew Bahr, Patrick Finnegan, Raymond Haltli, Matthew Jordan, Benjamin Klitsner, Tyler Liebsch, Andrew Mounce, Scott Edward Weatherred, Daniel Stick · 2024

Surface ion traps are a promising platform for quantum computing due to their potential to store large numbers of ions that can be addressed by electrical and optical control signals in order to implement quantum algorithms.Increasing the power of the quantum computer requires increasing the number of ions, but this poses a significant challenge in that it leads to a non-linear increase in on-chip power dissipation.The primary contributor to this power scaling in current devices is the capacitance between the radio frequency (RF) electrode and the metal plane that shields the silicon substrate from the RF signals applied to it.Silicon has traditionally been chosen for the substrate material for compatibility with the processing required for multi-metal-level traps.In this work, we address these capacitance and fabrication challenges by replacing the commonly used silicon substrate with an insulating sapphire substrate to fabricate a multi-metal-level ion trap, while still employing common semiconductor manufacturing techniques.This change in substrate allows the design to remove the metal shielding from the device design, reducing the capacitance of the RF electrode.The electrical characteristics of these traps were measured, specifically trap impedance, capacitance, and voltage breakdown, and compared to nearly identical silicon trap devices.Finally, we used laser cutting techniques to shape a sapphire wafer into bowtie shapes matching silicon traps previously fabricated at Sandia National Labs to explore solutions for integrating sapphire substrates into non-rectangular ion trap designs.

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