A Rapid Detection Method for TiN Residue On Al Bondpads
Y. N. Hua · 2024
A KOH testing method is introduced, which could be used as pre-diagnose TiN residues on Al bondpads. Experimental results showed that it is possible for us to pre-diagnose whether there are TiN residues on bondpads or not using the KOH pre-diagnose testing method. The experimental results show that if there are TiN residues, the “Island-like” pad surfaces will be formed on the Al bondpads. In order to finally confirm presentence of TiN on Al bondpads, Auger electron spectroscopy analysis is recommended to do further confirmation.