ALGORITHM FOR DETERMINING PHOTORESIST CHARACTERISTICS
Georgi Dobrev, Nikolay Paunkov, Radoslava Terzieva, Misho Matsankov, Iva Naydenova, Dilyana Budakova · Environment Technology Resources Proceedings of the International Scientific and Practical Conference · 2024
This paper presents data from a photoresist stady. Computational models have been developed to determine basic physical characteristics. A software algorithm for their derivation has been developed. Models for the calculation of basic characteristics such as integral sensitivity, efficiency, photoresist activation energy are presented. A number of statistical and mathematical analyses are presented.