Transistor Matrix Array for Measuring Variability and Random Telegraph Noise at Cryogenic Temperatures
T. Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Hiroshi Oka, Takahiro Mori, Masaharu Kobayashi, Toshiro Hiramoro · 2024
Addressable transistor arrays using 65 nm bulk technology were fabricated and tested at cryogenic temperatures. It was confirmed that variability at 1.5 K slightly degrades compared with 300 K. Random telegraph noise (RTN) was also measured and existence of extremely slow RTN at 1.5 K was confirmed using a quasi-parallel measurement technique. Such test structures will be particularly useful for enhancing cryogenic measurement efficiency.