Piezoelectric Impedance-based robust mass sensing with temperature decoupling
Jiawen Xu, Ruqiang Yan, Jiaji Chen · 2024
Microcantilevers are widely adopted in various fields for micro-mass sensing due to their simple structure and high sensitivity. The conventional microcantilever-based measurement methods required ultra-precision temperature control. However, such a requirement could hardly be satisfied and the temperature shifting would deteriorate the accuracy of mass sensing. In this research, an impedance-based temperature decoupling method is developed for robust mass sensing over a wide temperature range. The relative relationships of the peaks in the impedance signals are adopted for decoupling the temperature dependent terms in the eigenvalue problem. Besides, a CBAM-CNN network is developed for the modeling and mass sensing. Experimental studies indicate the proposed method yield robust mass sensing with accuracy up to 99.10 % under temperature range from 25 ℃ to 55 ℃. This method enables cantilever-based mass sensing without temperature compensation.