High-precision Alignment System Based on Sub-pixel Segmentation
Qiao Yusong, Zheng Liaomo, Beibei Li, Jing Dongdong, Zheng Yuting · 2023
In the field of intelligent manufacturing and precision machining, realizing the precision positioning and alignment process of components is an essential step. High-precision automatic alignment system plays an important role in improving product production efficiency and machining accuracy, which is the key guarantee for efficiency and quality. With the development of micron-level and submicron-level processes in the fields of precision electronics industry and micro-nano manufacturing, the alignment accuracy of the alignment marks on the two masks has also put forward higher requirements. Therefore, how to realize the mask high-precision alignment becomes the key to accuracy. In order to meet the requirements of high accuracy and high real-time performance of the alignment system, this paper proposes an improved sub-pixel edge detection algorithm for Franklin moments based on analyzing the existing Franklin moment edge detection algorithm. And a new high-precision alignment system is proposed by combining it with the PowerLink protocol. Experiments show that compared with other alignment systems, the system proposed in this paper is easier to deploy and can meet the accuracy requirements.