Isotopically Enriched Silicon, Germanium, and Their Hydrides for Quantum Computer Development
О. Yu. Troshin, Vladimir A. Gavva, A. Yu. Lashkov, А. Yu. Sozin, С. А. Адамчик, А. М. Потапов, П. А. Отопкова, А. Д. Буланов · Inorganic Materials · 2023
Abstract— In this paper, we report the preparation of high-purity 28Si silicon and 72Ge germanium isotopes and their volatile hydrides with controlled concentrations of the 29Si and 73Ge nonzero nuclear spin isotopes for producing Si/SiGe heterostructures for quantum computers employing the nuclear spin state as a qubit. We have prepared 28SiH4 and 28Si samples containing about 99.9, 99.99, and 99.999% 28Si as a major isotope and 340 ± 8, 41.1 ± 4.3, and 11.4 ± 0.1 ppm of the 29Si isotope. In addition, we obtained high-purity 72GeH4 and 72Ge samples containing about 99.9% 72Ge as a major isotope and 109.9 ± 9.6 ppm of the 73Ge isotope.