Study of the Sensitive Element of a Resonant Pressure Sensor with Membranes of Various Shapes
Phyo Win Tun, С. П. Тимошенков, Boris M. Simonov · 2023
In this paper, the various shapes of membrane of resonant pressure sensor with a pressure range of 100–1000 kPa, using the growing requirements of industrial gas pressure calibration equipment. The presented resonance pressure sensor design consists of an insulated silicon layer (SOI) and a silicon to glass (SOG) layer. The design of the sensing element (SE) was created in the SolidWorks and modeling was carries out in the ANSYS program. The deformations of SE diaphragms with various shapes under applied pressure range of 100–1000 kPa, mechanical stresses arising in SE structures with diaphragms of various shapes under applied pressure, and natural frequencies were calculated. It has been established that the natural oscillation frequency shifts depending on the applied pressure. The analysis showed that the studied SE designs have a high sensitivity and an optimized shape of the membranes and the parameters of the pressure sensors.