Impact of Tier Pitch Scaling on Heavy-Ion Sensitivity of 3-D NAND Flash Memories
Marta Bagatin, Simone Gerardin, A. Paccagnella, A. Benvenuti, Silvia Beltrami · IEEE Transactions on Nuclear Science · 2024
In this work, we study the impact of tier pitch scaling, one of the key enablers for increasing density, on the heavy-ion sensitivity of 3D NAND Flash memories using replacement gate technology and charge trap cells. Single-event-effect cross section increases more than proportionally to the reduction in tier pitch, primarily due to the reduction in stored charge. Heavy-ion induced threshold voltage shifts causing the errors are analyzed and discussed, with implications for future generations of non-volatile devices.