Compact and Low-Power Programmable Multiport Interferometer on CMOS-compatible Deuterated Silicon Nitride
Shuqing Lin, Zhaoyang Wu, Yanfeng Zhang, Siyuan Yu · 2022
A 6-mode programmable interferometer at 1550-nm wavelength is fabricated on CMOS-compatible silicon nitride platform. Featuring suspended thermo-optic phase shifters, the device shows 2-fold improvement in compactness and 10-fold in power efficiency compared to conventional device.