Design and Control of a Novel 3-D Piezoelectric Scanning Coaxial Optical Microscope System
Jim‐Wei Wu, Shao-An Chao, Ting-Kuei Hsu · IEEE Transactions on Instrumentation and Measurement · 2023
This paper presents a novel three-dimensional (3D) optical measurement system combining an optical microscope (OM) and a z-axis piezoelectric scanner. The proposed system includes an advanced controller for the piezoelectric scanner and an algorithm to process OM imaging data. The z-axis piezoelectric scanner uses a back-propagation neural network (BPNN) to control the upward movement of the sample in a step-wise manner. At the point where each step induces a small steady-state error, the OM captures an image in that position. Each 2D OM image undergoes denoising via connected-component labeling (CCL) before being converted into 3D data via image processing. The layered images are then stacked in a 3D arrangement to construct an accurate 3D image of the sample.