Automatic characterization of MEMS electronic filters
Natalia Wasilewska, Michał Nowicki, Roman Szewczyk, Paweł Nowak · 2022
Experimental electronic MEMS filters require testing of amplitude and phase characteristics. Reliable measurements require the development of a measurement method that will not only measure the characteristics, but also enable the simultaneous estimation of the measurement uncertainty. The computer-controlled measuring system described in the article enables the measurement of filter characteristics while maintaining measurement coherence, taking into account the fully automated process of estimating the measurement uncertainty. Additionally, the system enables the measurement of characteristics at different levels of input signals, which is particularly important in magnetomechanical systems. The tests carried out during the study of the characteristics of the exemplary MEMS magnetostrictive filter confirmed both the correctness of the proposed solution and its applicability in practice.