A One-Point Trimmed 0.14-mK-Resolution Temperature Sensor Based on Improved Dynamic Element Matching Techniques
Zhining Zhou, Hongming Lyu · 2022 7th International Conference on Integrated Circuits and Microsystems (ICICM) · 2022
This paper represents a systematic design of BJT-based temperature sensor with an ultra-high resolution. The system consists of BJT transistors as the sensing elements, a sigma-delta analog-to-digital converter (ADC) which achieves an SNDR of 134 dB and a sigma-delta digital-to-analog converter (DAC) as the trimming module. Dynamic element matching (DEM) techniques are employed to increase the sensing accuracy in the existence of random process variations. Clocking schemes for DEM and trimming subsystems are discussed, which plays a vital role in the achieved dynamic range of the sensor system. The presented work shows that the behavioral model achieves a temperature sensing resolution of 0.14-mK and an inaccuracy of 0.015°.