Remote System in Semiconductor Industry
Muhamad Nazir Bin Mislan · 2022
In conventional semiconductor machine operation method, it is required the operator physically to be in front of the machine. The operator needs to walk from one machine to another machine just to make the machine run. Without operator, the machine cannot run smoothly especially if there are many machine stoppages. Because of this issue, the engineer needs to work on how to reduce the machine stoppages and improve the machine performance. In certain circumstances, the machine has a limitation, and the machine stoppages cannot be improved anymore especially to the old machine generation. To maintain the old machine generation performance is very challenging and sometime the machine spare part is also obsoleted. By introducing the remote system in the semiconductor, it will help to solve the machine limitation issue. From the control room, the operator able to clear the machine stoppages without physically need to be in front of the machine. It will help to reduce operator workload, reduce the machine downtime, improve the man-to-machine ratio and at the end reduce the cost. Fig. 1 below shown the comparison between with and without remote system. The number of operators can be reduced significantly, and the movement of the operator also can be reduced. Bear in mind, not all the machine stoppages can be remoted. The remote system also has its own limitation. For example, change material, change lot, and change the machine part cannot be done remotely. Its still require operator physically to be in front of the machine.