Measurement of Parameters of MEMS Electronic Filters with Automatic Determination of Uncertainty

Natalia Wasilewska, Paweł Nowak, Roman Szewczyk · Pomiary, Automatyka, Robotyka · 2022

MEMS type electronic filters used in practice require experimental testing of amplitude and phase characteristics. This requires the development of a measurement method that will not only measure the characteristics, but also allow for the simultaneous estimation of the measurement uncertainty. The computer-controlled measuring system described in the article enables the measurement of filter characteristics while maintaining measurement traceability, taking into account the fully automated process of estimating the measurement uncertainty. The tests carried out during the study of the characteristics of the exemplary magnetostrictive filter confirmed both the correctness of the proposed solution and its applicability in practice.

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