Sequence control
Materials Today · 2003
Sequence controlPrecise control of microelectromechanical systems and microfluidics experiments is provided by LabSmith, Inc.'s HVS448 High Voltage Sequencer.The new system is designed to control all aspects of an experiment, having eight channels that can each function as high voltage supplies, as well as precision current and voltage sensors.Sequencing software allows the channels to change modes and respond to external events in a programmable manner.Contact: www.labsmith.comControlling the pressure Softshut™ throttling gate valves provide fast and accurate vacuum pressure control with leak-tight sealing over a broad pressure range.Jointly introduced by Thermo Vacuum Generators and Nor-Cal, the valves can be used for controlling pressure and gas flows in etch, sputtering, and chemical vapor deposition of semiconductors, as well as in manufacturing systems for microelectromechanical systems, light-emitting diodes, flat panel displays, and photonic devices.An Intellisys™ controller virtually eliminates overshoot or gradual ramps during pressure transitions.The gate valves use six million position steps to throttle and control pressure accurately, even when the valve is almost closed.