Best bits: Applications of microprocessors: Mechanics on a chip
IEEE Spectrum · 1981
If one can build a computer on a chip, why not nozzles, pumps, valves, and sensors on chips? Hessarchers at Stanford University's Integrated Circuits Laboratory and IBM's San Jose Research Laboratories in California have developed techniques that put devices like these on silicon wafers. The micromechanical structures are fabricated in much the same way as conventional ICs.