Getting to the bottom of deep submicron

D. Sylvester, K. Keutzer · 2002

In ibis tutotia~wt take a frtxb hok at tbe probhms posed @ deep submimon ~S~14) geometn.esandre+pen the investigationinto bow DS~l{ ti~ectsan most Jke~going to a~ectj~ture de,ign methobhgies.~~e dej-'~bea conpnbensive appmacb to accurate~CbafaCfetiVhg the dtvice and interconnectcharactetitics of present and future process gtncrations.This @proacbresu!fsin the generationof a representative strawman tecbnok~that is used in coykncfion with ana~fical mo~k, >-imulatiou tools,and empin>a[ des~n hfa fo obfaina nakicpicftt~of fbt ft{furt of ciraiif de.v~n.We then proceedfo quanft~the pretie inpact of interconnect, includtg de~degrahfion due fo noke, on b@bpefovnanie &IC destjns.Having detemined the roh ofinterconnect in pe+nnance, we fben ncontider the inpacf of~furepmcesses on AIC des~n metbodo[o~.

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