New Sensors for Automotive and Aerospace Applications
G. Müller, G. Krötz, J. Schalk · physica status solidi (a) · 2001
In modern cars, sensors, actuators and electronic components play an increasing role. Driving forces are the demand for improved safety, higher comfort as well as increased economy and ecology. The paper presents an overview on semiconductor sensors that had been designed to reach such objectives. Examples for micromachined silicon sensors as well as highly innovative devices based on wide-bandgap semiconductor materials are presented. Spin-offs to aerospace applications are also discussed.