A FORTRAN program for analysis of data from microelectronic test structures
R. L. Mattis, M. Buehler · 1983
Example of test site locations 4 2. Sample label file 8 3. Sample data file 9 4. Example of an input data file in format 3 17 5.Sample numerical map 22 6.Key which accompanies map of figure 5 23 7. Sample graytone map 25 8. Key which accompanies map of figure 7 26 9. Sample contour map 27 10.Sample histogram 29 11.Sample output of CORTABLE showing sample correlation coeffi- cients (above) and number of point pairs in the sample (below) 38 iv Disclaimer Certain commercial equipment, instruments, or materials are identified in this report in order to adequately specify the experimental procedure.In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the material or equipment identified is necessarily the best available for the purpose.