TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (IEEE Cat. No. 05TH8791)
2005
The following topics are dealt with: MEMS and their design and analysis; pressure sensors; 3D fabrication; electrostatic actuators; microdroplets and micro bead technology; carbon nanotube processes; inertial microsystems; surface tension and electrowetting liquid actuators; biochips; AFM/probe fabrication; micropumps; bio-tools; sensor network integration; resonator-type sensors; nano-electrical characterization; biosensors and cells; power generators for stand-alone systems; physical sensors; pneumatic and hydraulic actuators; microfluidics; microlens and laser applications; packaging of microsystems; bio-cells; sensing systems and networks; accelerometers and gyroscopes; micro/nano cantilever sensors; fluid handling actuators; microactuators; stress and strength of MEMS materials; optical MEMS; optical biosensing; DRIE technology; CMOS type chemical sensors; nano and micro-biosystems; micromirrors and applications; fluidics fabrication; air quality monitoring chemical sensors; bio-probes; MEMS spectrometer; concept and analysis in fluids and bubbles; polymer-based chemical devices; bio measurement technology; integration technology; advanced micro/nano machining; micromachining of soft materials; micro/nano patterning; micro channel fabrication; fluidic devices; bio patterning; micro TAS; medical and biology applications; cell handling devices; bio sensors/sensing; chemical sensor materials; electro-chemical devices; gas sensors; RF MEMS switches and antennas; material characterization; packaging technology; instrumentation and biosystems; polymer processes; RF MEMS resonators; chemical sensors for analytical systems; materials for sensors; stress analysis in thin films; special-use chemical sensors.