Simulation study of semiconductor communication protocol SECS/GEM
Zhu Mengyun, Xiudong Peng, Yuanfeng Sun, Sidi Fuyang, Dongbao Jiao · 2021 International Conference on Wireless Communications and Smart Grid (ICWCSG) · 2021
After a series of events that semiconductor industry was threatened, the domestic attention on the semiconductor industry unprecedentedly rises. Currently, back-end automation in semiconductor manufacturing is still low due to inconsistent communication interfaces between devices. The paper focus on a simulation of a semiconductor communication protocol named SECS/GEM (SEMI Equipment Communications Standard/ Generic Model for Communications) to do help to the understanding and implementation of SECS/GEM. The simulation of the protocol was divided into 4 modules: Visualization module, SECS-II module, HSMS module and GEM module, and supplemented by Python language