Monolithic Integration of III-V/Si Hybrid MOS Optical Phase Shifter and InGaAs Membrane Photodetector
Shuhei Ohno, S. Monfray, F. Bœuf, Kasidit Toprasertpong, Shinichi Takagi, Mitsuru Takenaka · 2021
We present proof-of-concept monolithic integration of III-V/Si hybrid MOS optical phase shifter and InGaAs membrane photodetector for Si programmable photonic integrated circuits. We demonstrated responsivity of > 1.0 A/W at O-band owing to avalanche amplification.