Silicon photonic MEMS phase shifter with μs time constant built on a foundry platform
Pierre Edinger, Kristofer Kristinsson, Carlos Errando-Herranz, Alain Yuji Takabayashi, Hamed Sattari, Niels Quack, Peter Verheyen, Wim Bogaerts, Kristinn B. Gylfason · Conference on Lasers and Electro-Optics · 2021
MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2π phase shifter with a 1.54 μs time constant and 0.5 dB insertion loss in IMEC’s iSiPP50G platform.