Thermal Compensation Method for Piezoresistive Pressure Transducer
Ricardo dos Santos Pereira, C. A. Cima · IEEE Transactions on Instrumentation and Measurement · 2021
Piezoresistive pressure sensors are employed in a wide range of applications, but their output signal shows a substantial dependence on the working temperature. Usually, there is a need for an additional component to ensure a proper temperature-compensated signal for the sensors. In this article, we describe a method for the sensor thermal compensation that uses only the electrical signal produced by the pressure sensors themselves, without the need of additional measurements. The method proved to be effective while also ensuring a significant reduction in the measurement error.