Fractal Pull-in Stability Theory for Microelectromechanical Systems
Dan Tian, Chun‐Hui He, Ji‐Huan He · Frontiers in Physics · 2021
Pull-in instability was an important phenomenon in microelectromechanical systems (MEMS). In the past, MEMS were usually assumed to work in an ideal environment. But in the real circumstances, MEMS often work in dust-filled air, which is equivalent to working in porous media, that's mean fractal space. In this paper, we studied MEMS in fractal space and established the corresponding model. At the same time, we can control the occurrence time and stable time of pull-in by adjusting the value of the fractal index, and obtain a stable pull-in phenomenon.