Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
Harrie A. C. Tilmans · Journal of Micromechanics and Microengineering · 1996
Several errors occurred in the tables and equations of this article. The corrected versions are reproduced below. Table 1. Constitutive and transfer equations of the lumped-parameter transducers shown in figure 3, completed with a stabilization spring k at the mechanical port (as illustrated by figure 4). The matrix equations describe the relations between the phasor quantities of the sinusoidal signals. The meaning of the symbols is explained in appendix B and in table 2. Table 2. Parameters used in table 1, expressed in terms of the dimensional parameters, the bias conditions, and physical constants. Table 3. Direct electromechanical analogies for lumped translational systems [1,2].