Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits
Pierre Edinger, Carlos Errando-Herranz, Kristinn B. Gylfason · Conference on Lasers and Electro-Optics · 2019
The low power consumption of MEMS actuators enables large-scale reconfigurable photonic circuits. However, insertion loss and actuation linearity need improvement. By simulations and experiments, we analyze the dominating design parameters affecting linearity and suggest improvements.