Method of Sensitivity Calculation for Electrete Diaphragm Capacitive Sensors
Anton Igorevich Saveliev, Н. С. Пщелко, Konstantin Krestovnikov · 2019
This paper presents sensitivity calculation method for diaphragm capacitive electret-based sensors. Known calculation methods for capacitive electret-based sensors are considered, their advantages and disadvantages are studied. The developed method presented here allows calculating of static, dynamic and electrical system characteristics. Upon the method developed here electret microphone sensitivity is calculated depending on frequency. The method showed high convergence with experimental data.