RESONANT STRUCTURES FOR INTEGRATED SENSORS
Martin A. Schmidt, Roger T. Howe · 1986
This paper reviews mechanically resonant microsensors and the design issues for this class of sensors.We apply Rayleigh's Method to determine the resonant fre quencies of common microstructures, and show that it provides insight into perturbin g the resonance in sensing applications.Resonant microsensors that meas ure mass loading and force or pressure are studied.We conclude with a discussion of some of the important issues in resonant microsensor design.