Technological Sensor on Coupled Radial Spirals
Yuriy Nikitich Pchelnikov, Andrey A. Yelizarov · IEEE Transactions on Electron Devices · 2020
We present the sensor with a sensitive element (SE) based on coupled radial spirals, which can be used for monitoring technological processes in the Electronic Industry, as well as for detecting damages on the pipelines under protective coatings. The main properties and characteristics of such SE are analyzed and measured. It is shown that the concentration of the electromagnetic field in a measuring space, caused by slowing down of the the wave, and splitting of the electric and magnetic fields leads to a significant increase in sensitivity, whereas the multiple increases in the slowdown makes it possible to use the advantages of SE with distributed parameters at relatively low operating frequencies. The practical realization of the described sensor is demonstrated in measuring the ion implantation processes and the thickness of the metallization, as well as in monitoring the invisible cracks and damages through the protective coats on the metal surfaces.