Development of SECS/GEM LabVIEW Toolkit for GEM-compliant Semiconductor Equipment
Sheng Chung Yaw · 2019
In this project, the main goal is to develop SECS/GEM Library Toolkit for GEM-compliant Semiconductor equipment. The SEMI Equipment Communications Standard (SECS) /Generic Equipment Model (GEM) standards are widely adapted in the Semiconductor industry, but the SECS/GEM library are only available for in other programming environment such as C++ and Java, but not in LabVIEW. SECS/GEM standards are extensively used in this project to define the function of the message in the library, such as Alarm Report and Event Report. The SECS/GEM messages are coded in LabVIEW and LabVIEW are used for communication between the equipment and the device running LabVIEW. This project follows heavily on the SECS/GEM standards developed by Semiconductor Equipment and Materials International Organization (SEMI), and the standards allows for control and monitoring of GEM-compliant semiconductor equipment and pushes the industry further ahead on the concept of Industry 4.0. Besides that, Implementation of SECS/GEM standards in the industry is discussed in this paper, for a wide variety of functions and tasks to either control or monitor the GEM-compliant equipment. A brief introduction of LabVIEW is also included. Furthermore, the project methodology in the method of implementation of SECS/GEM library in LabVIEW also included in this paper. The development of the LabVIEW Library Toolkit for GEM-compliant Semiconductor equipment is also completed in this project.