Analysis of static impedance abnormity based on EMMI
Huaqun Meng, Rongqiang Li, Panpan Zhang, Yanru Chen · 2017
This paper presents an analytical approach for static impedance abnormity of the semiconductor integrated circuit. The design details and manufacturing process have been briefly described. The Emission Microscope (EMMI) is adopted in the analytical approach in order to locate the position that causes static impedance to be abnormally low. Combined with process analysis, the cause of static impedance abnormity will be precisely found.