Electrode structure and characteristics of uniplanar scattering-field capacitive sensors
Yonggui Dong · Journal of Tsinghua University(Science and Technology) · 2004
The electrode structure of the uniplanar scattering-field capacitive sensor is the essential factor affecting sensor performance. However, the scattering of the electric field makes precise analysis with traditional electromagnetism theory difficult, which complicates the design process, especially performance optimization. Therefore, a finite element analysis was used to solve the electromagnetic equations to analyze the relationship between the electrode structure and the field characteristics. Experiments validated the analytical results. The results indicate that uniplanar electrodes used as the non-contact proximity sensor for a metal target have an optimized gap size between the two electrodes. The interdigitated structure gives better measurement scale and sensitivity than the general two-electrode structure.