Automatic Generation of Small-Signal Dynamic Macromodels from 3-D Simulation
Deepak Ramaswamy, Jackob K. White · 2001
Recent algorithmic developments have greatly accelerated 3-D simulation of micromachined devices, but simulation and optimization of systems which use those devices require much more easily evaluated, yet still accurate, macromodels. In this paper we focus on generating dynamically accurate small-signal macromodels, useful in many signal processing and feedback control applications. Results are presented demonstrating that dynamically accurate macromodels for the small-signal behavior of a cantilever beam and a micromirror can be automatically generated directly from 3-D simulation. Keywords: MEMS, Model, Reduction, Arnoldi, Elec- tromechanical I