Acquisition of 3-dimensional stereoscopic images under a microscope by a swinging glass stage
Daisuke IGUCHI, Kiyoshi Matsumoto · The Proceedings of the Symposium on Micro-Nano Science and Technology · 2019
To execute efficient and precise handling tasks in micro world, a bilateral system which connects the micro and macro worlds in both directions has been developed. In order to improve the work efficiency, 3-dimensional observation of objects in the micro world is necessary. Two images with parallax are necessary for the 3-D observation, but it is difficult to obtain these images under a microscope. In this research, we proposed a method of obtaining parallax images by inserting a glass plate under the microscope, tilting the plate and thus changing the optical path by a small distance. In order to electrically control the tilt of the glass plate, we developed a swinging actuator driven by voice coils. In addition, mechanical characteristics of the swinging glass stage and characteristics of the feedback control system were confirmed.