Comparative Analysis between Multi-grid MEMS Structure and Inter-digital Electrodes for Moisture Measurement
Prakriti Kapoor, Vishal Mehta, Rahul Bansal, Satinder Rana, Jatinderpal Singh, Ajit Kumar Singh · International Journal of u- and e- Service Science and Technology · 2015
This paper describe design of novel sensor for moisture measurement that can be used in agriculture, automotive industries.In the present scenario moisture is measured by calculating change in relative permittivity which in turn depends upon change in capacitance of polymer layer sandwiched between electrodes.In this paper a new design is presented in which IDC sensor is used instead of Grid electrodes to calculate change in capacitance.Further, Comparative analysis has been done between these two topologies; device modeling has been carried out using COMSOL Multi-physics suite with MEMS approach.