Circuit simulation of the process of film resistive elements laser trimming under the effect of a measuring current source
Vladimir V. Kondrashov, Vyacheslav V. Chapkin, A V Lukashenkov · Journal of Physics Conference Series · 2018
To solve the problems of film resistors laser trimming, finding the optimal cutting trajectory, and predicting the results, a discrete grid circuit model of the conductive medium is proposed. This circuit model is a grid with a sufficiently small step of elementary resistors, showing the distribution of currents and potential in a conducting medium. A mathematical model of a conducting medium is obtained in the form of algebraic equations system for the voltages at grid nodes, currents and voltages on elementary resistors. An algorithm for calculating the electrophysical parameters of a resistor is developed with a change in the structure of the grid model in the process of trimming and finding the optimal cutting trajectory.