Microelectronic test patterns NBS-12 and NBS-24
G. P. Carver, R. L. Mattis, M. Buehler · 1981
Microelectronic test patterns NBS-12 and NBS-24 are modular developmental patterns for experimentally evaluating improved designs of certain test structures.NBS-12 addresses geometric design consid- erations for the cross-bridge sheet resistor test structure.NBS- 24 contains a variety of preliminary designs for the integrated gated-diode electrometer and a series of variations on the design of the MOSFET dc profiler.Both patterns also include assorted process parameter test structures.Tables of design parameters, functional descriptions of the test structures in each pattern, and computer-composed outline drawings showing all of the test struc- tures are included.