Improvement of Cell VT Distribution & Program Disturbance of NAND Flash Device by Using Tilt Implantation for Cell Junction Counter Doping
Donghyun Kim, N.K. Kim, K.T. Lee, H. Y. Shim, S.K. Park, B.K. Kim, K.B. Lee, Heenyun Chang, Kun-Ok Ahn, J.W. Kim · Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials · 2015
2015 International Conference on Solid State Devices and Materials,Improvement of Cell VT Distribution & Program Disturbance of NAND Flash Device by Using Tilt Implantation for Cell Junction Counter Doping