Design considerations for the cross-bridge sheet resistor
G. P. Carver, R. L. Mattis, M. G. Buehler · 1982
The cross-bridge sheet resistor test structure is used to obtain the sheet resistance and electrical linewidth of a conducting lay- er.It has been used to characterize various conducting layers found in an integrated circuit fabrication process and to evaluate lithographic equipment used for processing photomasks and wafers.Three geometrical design factors for the cross bridge have been investigated and are shown to cause systematic inaccuracies of less than 1 percent in the sheet resistance and linewidth measurements.Based upon experimental results from sequences of devices with in- crementally different geometrical parameters, several design crite- ria for the cross-bridge sheet resistor have been established.