(Invited) Materials and Processes for Superconducting Qubits and Superconducting Electronic Circuits on 300mm Wafers
Satyavolu S. Papa Rao, Christopher C. Hobbs, Stephen Olson, Neda Foroozani, Hyuncher Chong, Harlan Stamper, Brian Martinick, Dominic Ashworth, Benjamin D. Bunday, Matthew Malloy, Eric Holland, Jakub Nalaskowski, Patrick A. Kearney, Tat Ngai, Ilyssa Wells, Michail M. Yakimov, S. Oktyabrsky, Brendan B. O'Brien, Vidya S. Kaushik, Kathleen A. Dunn · ECS Transactions · 2018
(Invited) Materials and Processes for Superconducting Qubits and Superconducting Electronic Circuits on 300mm Wafers, Papa Rao, Satyavolu S., Hobbs, Christopher, Olson, Stephen, Foroozani, Neda, Chong, Hyuncher, Stamper, Harlan, Martinick, Brian, Ashworth, Dominic, Bunday, Benjamin, Malloy, Matthew, Holland, Eric, Nalaskowski, Jakub, Kearney, Patrick, Ngai, Tat, Wells, Ilyssa, Yakimov, Michael, Oktyabrsky, Serge, O'Brien, Brendan, Kaushik, Vidya, Dunn, Kathleen A, Beckmann, Karsten, Bennett, Stephen, Rodgers, Martin, Murray, Thomas, Novak, Steven, Baker-O'Neal, Brett, Borst, Christopher, Osborn, Kevin D, Liehr, Michael