Anisotropic Crystalline Etching Simulation Using a Continuous Cellular Automata Algorithm
Zhenjun Zhu, Chang Liu · Micro-Electro-Mechanical Systems (MEMS) · 1998
Abstract We present results on the development of an anisotropic crystalline etching simulation (ACES) program based on a new continuous Cellular Automata (CA) model. The program provides accurate modeling of etching process with high spatial resolution. Implementation of a dynamic CA technique has resulted in increased simulation speed and reduced memory requirements. A first ACES software based on PC platforms has been realized.