804 Development of A MEMS DC Sensor for Electricity End-use Monitoring (Part II)
Kohei Isagawa, Yasuhíro Suzuki, Dong F. Wang, Takeshi Kobayashi, Toshihiro Itoh, Ryutaro Maeda · The Proceedings of Ibaraki District Conference · 2011
A non-drive power, non-contact MEMS DC electric current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord has been proposed. A structural design with an applicable approach has been theoretically discussed in order to increase output voltage. A MEMS DC sensor has been then designed from the view point of reasonable output voltage measurements, and preliminarily micro-fabricated for further characterizations.